发明授权
- 专利标题: Semiconductor memory device and method for manufacturing same
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US12841662申请日: 2010-07-22
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公开(公告)号: US08338882B2公开(公告)日: 2012-12-25
- 发明人: Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Hideaki Aochi
- 申请人: Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Hideaki Aochi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-052887 20100310
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
According to one embodiment, a semiconductor memory device includes a base, a stacked body, a memory film, a channel body, an interconnection, and a contact plug. The base includes a substrate and a peripheral circuit formed on a surface of the substrate. The stacked body includes a plurality of conductive layers and a plurality of insulating layers alternately stacked above the base. The memory film is provided on an inner wall of a memory hole punched through the stacked body to reach a lowermost layer of the conductive layers. The memory film includes a charge storage film. The interconnection is provided below the stacked body. The interconnection electrically connects the lowermost layer of the conductive layers in an interconnection region laid out on an outside of a memory cell array region and the peripheral circuit. The contact plug pierces the stacked body in the interconnection region to reach the lowermost layer of the conductive layers in the interconnection region.
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