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    Nonvolatile semiconductor memory device
    1.
    发明授权
    Nonvolatile semiconductor memory device 有权
    非易失性半导体存储器件

    公开(公告)号：US08653577B2

    公开(公告)日：2014-02-18

    申请号：US13003644

    申请日：2009-07-01

    申请人： Yoshiaki Fukuzumi ,  Hiroyasu Tanaka ,  Yosuke Komori ,  Megumi Ishiduki ,  Masaru Kito ,  Hideaki Aochi ,  Ryota Katsumata ,  Masaru Kidoh

    发明人： Yoshiaki Fukuzumi ,  Hiroyasu Tanaka ,  Yosuke Komori ,  Megumi Ishiduki ,  Masaru Kito ,  Hideaki Aochi ,  Ryota Katsumata ,  Masaru Kidoh

    IPC分类号： H01L29/788 ,  H01L29/792

    CPC分类号： H01L29/7926 ,  G11C16/0466 ,  H01L27/11565 ,  H01L27/11578 ,  H01L27/11582

    摘要： A nonvolatile semiconductor memory device includes: a stacked body in which insulating films and electrode films are alternately stacked; selection gate electrodes provided on the stacked body; bit lines provided on the selection gate electrodes; semiconductor pillars; connective members separated from one another; and a charge storage layer provided between the electrode film and the semiconductor pillar. One of the connective members is connected between a lower part of one of the semiconductor pillars and a lower part of another of the semiconductor pillars. The one of the semiconductor pillars passes through one of the selection gate electrodes and is connected to one of the bit lines, and the another of the semiconductor pillars passes through another of the selection gate electrodes and is connected to another of the bit lines.

    摘要翻译： 非易失性半导体存储器件包括：绝缘膜和电极膜交替层叠的层叠体; 设置在层叠体上的选择栅电极; 设置在选择栅电极上的位线; 半导体柱 连接成员彼此分离; 以及设置在电极膜和半导体柱之间的电荷存储层。 一个连接构件连接在一个半导体柱的下部和另一个半导体柱的下部之间。 半导体柱中的一个穿过选择栅极之一并连接到一个位线，并且另一个半导体柱通过另一个选择栅电极并连接到另一个位线。

    Nonvolatile semiconductor memory device
    2.
    发明授权
    Nonvolatile semiconductor memory device 有权
    非易失性半导体存储器件

    公开(公告)号：US08350326B2

    公开(公告)日：2013-01-08

    申请号：US12839895

    申请日：2010-07-20

    申请人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kito ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi

    发明人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kito ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi

    IPC分类号： H01L29/792

    CPC分类号： H01L29/7926 ,  H01L21/28282 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/42344 ,  H01L29/66833

    摘要： According to one embodiment, a nonvolatile semiconductor memory device includes first and second stacked structural bodies, first and second semiconductor pillars, a memory unit connection portion, a selection unit stacked structural body, first and second selection unit semiconductor pillars, a selection unit connection portion, and first to fifth interconnections. The semiconductor pillars pierce the stacked structural bodies. The first and second interconnections are connected to the first and second semiconductor pillars, respectively. The memory unit connection portion connects the first and second semiconductor pillars. The selection unit semiconductor pillars pierce the selection unit stacked structural body. The third and fourth interconnections are connected to the first and second selection unit semiconductor pillars, respectively. The selection unit connection portion connects the first and second selection unit semiconductor pillars. The fifth interconnection is connected to the third interconnection on a side opposite to the selection unit stacked structural body.

    摘要翻译： 根据一个实施例，非易失性半导体存储器件包括第一和第二堆叠结构体，第一和第二半导体柱，存储单元连接部分，选择单元堆叠结构体，第一和第二选择单元半导体柱，选择单元连接部分 ，以及第一至第五互连。 半导体支柱刺穿堆叠的结构体。 第一和第二互连分别连接到第一和第二半导体柱。 存储单元连接部连接第一和第二半导体柱。 选择单元半导体柱刺穿选择单元堆叠结构体。 第三和第四互连分别连接到第一和第二选择单元半导体柱。 选择单元连接部分连接第一和第二选择单元半导体柱。 第五互连在与选择单元堆叠结构体相反的一侧连接到第三互连。

    Semiconductor memory device and method for manufacturing same
    3.
    发明授权
    Semiconductor memory device and method for manufacturing same 有权
    半导体存储器件及其制造方法

    公开(公告)号：US08338882B2

    公开(公告)日：2012-12-25

    申请号：US12841662

    申请日：2010-07-22

    申请人： Hiroyasu Tanaka ,  Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Hideaki Aochi

    发明人： Hiroyasu Tanaka ,  Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Hideaki Aochi

    IPC分类号： H01L29/792

    CPC分类号： H01L27/11578 ,  H01L27/11565 ,  H01L27/11573 ,  H01L27/11575 ,  H01L27/11582

    摘要： According to one embodiment, a semiconductor memory device includes a base, a stacked body, a memory film, a channel body, an interconnection, and a contact plug. The base includes a substrate and a peripheral circuit formed on a surface of the substrate. The stacked body includes a plurality of conductive layers and a plurality of insulating layers alternately stacked above the base. The memory film is provided on an inner wall of a memory hole punched through the stacked body to reach a lowermost layer of the conductive layers. The memory film includes a charge storage film. The interconnection is provided below the stacked body. The interconnection electrically connects the lowermost layer of the conductive layers in an interconnection region laid out on an outside of a memory cell array region and the peripheral circuit. The contact plug pierces the stacked body in the interconnection region to reach the lowermost layer of the conductive layers in the interconnection region.

    摘要翻译： 根据一个实施例，半导体存储器件包括基底，堆叠体，存储膜，通道体，互连和接触插塞。 基底包括形成在基片的表面上的基片和外围电路。 堆叠体包括多个导电层和交替堆叠在基底之上的多个绝缘层。 记忆膜设置在通过层叠体冲压的存储孔的内壁上，以到达导电层的最下层。 记忆膜包括电荷存储膜。 互连设置在堆叠体的下方。 互连电连接布置在存储单元阵列区域的外部的互连区域中的导电层的最下层和外围电路。 接触插塞刺穿互连区域中的层叠体到达互连区域中的导电层的最下层。

    Non-volatile semiconductor storage device having memory cells disposed three-dimensionally, and method of manufacturing the same
    7.
    发明授权
    Non-volatile semiconductor storage device having memory cells disposed three-dimensionally, and method of manufacturing the same 有权
    具有三维配置存储单元的非易失性半导体存储装置及其制造方法

    公开(公告)号：US08178917B2

    公开(公告)日：2012-05-15

    申请号：US12408249

    申请日：2009-03-20

    申请人： Hiroyasu Tanaka ,  Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Yosuke Komori ,  Hideaki Aochi ,  Megumi Ishiduki ,  Yasuyuki Matsuoka

    发明人： Hiroyasu Tanaka ,  Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Yosuke Komori ,  Hideaki Aochi ,  Megumi Ishiduki ,  Yasuyuki Matsuoka

    IPC分类号： H01L29/792

    CPC分类号： H01L27/11578 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11573 ,  H01L27/11582

    摘要： A non-volatile semiconductor storage device includes a first layer and a second layer. The first layer includes: a plurality of first conductive layers extending in parallel to a substrate and laminated in a direction perpendicular to the substrate; a first insulation layer formed on an upper layer of the plurality of first conductive layers; a first semiconductor layer formed to penetrate the plurality of first conductive layers; and a charge accumulation layer formed between the first conductive layers and the first semiconductor layer. Respective ends of the first conductive layers are formed in a stepwise manner in relation to each other in a first direction. The second layer includes: a plurality of second conductive layers extending in parallel to the substrate and laminated in a direction perpendicular to the substrate, the second conductive layers being formed in the same layer as the plurality of first conductive layers; and a second insulation layer formed on an upper layer of the plurality of second conductive layers. Respective ends of the second conductive layers are formed to align along a straight line extending in a direction substantially perpendicular to the substrate at a predetermined area.

    摘要翻译： 非易失性半导体存储装置包括第一层和第二层。 第一层包括：多个第一导电层，其平行于衬底延伸并且在垂直于衬底的方向上层压; 形成在所述多个第一导电层的上层上的第一绝缘层; 形成为穿透所述多个第一导电层的第一半导体层; 以及形成在第一导电层和第一半导体层之间的电荷累积层。 第一导电层的相应端部在第一方向上相对于彼此以逐步的方式形成。 第二层包括：多个第二导电层，其平行于衬底延伸并且在垂直于衬底的方向上层叠，第二导电层形成在与多个第一导电层相同的层中; 以及形成在所述多个第二导电层的上层上的第二绝缘层。 形成第二导电层的相应端，沿着在预定区域上基本上垂直于衬底的方向延伸的直线对齐。

    Semiconductor memory device
    9.
    发明授权
    Semiconductor memory device 有权
    半导体存储器件

    公开(公告)号：US08089120B2

    公开(公告)日：2012-01-03

    申请号：US12562781

    申请日：2009-09-18

    申请人： Hiroyasu Tanaka ,  Masaru Kidoh ,  Ryota Katsumata ,  Masaru Kito ,  Yosuke Komori ,  Megumi Ishiduki ,  Hideaki Aochi ,  Yoshiaki Fukuzumi

    发明人： Hiroyasu Tanaka ,  Masaru Kidoh ,  Ryota Katsumata ,  Masaru Kito ,  Yosuke Komori ,  Megumi Ishiduki ,  Hideaki Aochi ,  Yoshiaki Fukuzumi

    IPC分类号： H01L29/792 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113

    CPC分类号： H01L27/11578 ,  H01L27/11582

    摘要： A semiconductor memory device includes: a semiconductor substrate; a stacked body with a plurality of conductive layers and a plurality of dielectric layers alternately stacked, the stacked body being provided on the semiconductor substrate; a semiconductor layer provided inside a hole formed through the stacked body, the semiconductor layer extending in stacking direction of the conductive layers and the dielectric layers; and a charge storage layer provided between the conductive layers and the semiconductor layer. The stacked body in a memory cell array region including a plurality of memory strings is divided into a plurality of blocks by slits with an interlayer dielectric film buried therein, the memory string including as many memory cells series-connected in the stacking direction as the conductive layers, the memory cell including the conductive layer, the semiconductor layer, and the charge storage layer provided between the conductive layer and the semiconductor layer, and each of the block is surrounded by the slits formed in a closed pattern.

    摘要翻译： 半导体存储器件包括：半导体衬底; 具有交替堆叠的多个导电层和多个电介质层的层叠体，所述层叠体设置在所述半导体基板上; 设置在通过所述层叠体形成的孔内的半导体层，所述半导体层沿所述导电层和所述电介质层的堆叠方向延伸; 以及设置在导电层和半导体层之间的电荷存储层。 包含多个存储器串的存储单元阵列区域中的堆叠体被埋置在其中的层间电介质膜的狭缝分成多个块，该存储串包括在堆叠方向上串联连接的存储单元作为导电 存储单元包括导电层，半导体层和设置在导电层和半导体层之间的电荷存储层，并且每个块被形成为封闭图案的狭缝包围。