发明授权
- 专利标题: Multiple seal ring structure
- 专利标题(中): 多重密封圈结构
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申请号: US12938272申请日: 2010-11-02
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公开(公告)号: US08338917B2公开(公告)日: 2012-12-25
- 发明人: Dun-Nian Yaung , Jen-Cheng Liu , Jeng-Shyan Lin , Wen-De Wang , Shu-Ting Tsai
- 申请人: Dun-Nian Yaung , Jen-Cheng Liu , Jeng-Shyan Lin , Wen-De Wang , Shu-Ting Tsai
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L23/02
- IPC分类号: H01L23/02 ; H01L21/71
摘要:
The present disclosure provides a method of fabricating a semiconductor device, the method including providing a substrate having a seal ring region and a circuit region, forming a first seal ring structure over the seal ring region, forming a second seal ring structure over the seal ring region and adjacent to the first seal ring structure, and forming a first passivation layer disposed over the first and second seal ring structures. A semiconductor device fabricated by such a method is also provided.
公开/授权文献
- US20120038028A1 MULTIPLE SEAL RING STRUCTURE 公开/授权日:2012-02-16
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