发明授权
US08339859B2 Nonvolatile memory devices that utilize dummy word line segments to inhibit dishing during fabrication
有权
在制造期间利用伪字线段来抑制凹陷的非易失性存储器件
- 专利标题: Nonvolatile memory devices that utilize dummy word line segments to inhibit dishing during fabrication
- 专利标题(中): 在制造期间利用伪字线段来抑制凹陷的非易失性存储器件
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申请号: US13404335申请日: 2012-02-24
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公开(公告)号: US08339859B2公开(公告)日: 2012-12-25
- 发明人: Jang-ho Park , Jae-kwan Park , Dong-hwa Kwak , So-wi Jin , Byung-jun Hwang , Nam-su Lim
- 申请人: Jang-ho Park , Jae-kwan Park , Dong-hwa Kwak , So-wi Jin , Byung-jun Hwang , Nam-su Lim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2007-0132606 20071217
- 主分类号: G11C16/04
- IPC分类号: G11C16/04
摘要:
A NAND flash memory device includes a plurality of continuous conductors disposed on a common level of a multilayer substrate, the plurality of continuous conductors including respective conductive lines extending in parallel along a first direction, respective contact pads disposed at ends of the respective conductive lines and respective conductive dummy lines extending in parallel from the contact pads along a second direction.
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