发明授权
US08350341B2 Method and structure for work function engineering in transistors including a high dielectric constant gate insulator and metal gate (HKMG)
有权
晶体管中工作功能工程的方法和结构包括高介电常数栅极绝缘体和金属栅极(HKMG)
- 专利标题: Method and structure for work function engineering in transistors including a high dielectric constant gate insulator and metal gate (HKMG)
- 专利标题(中): 晶体管中工作功能工程的方法和结构包括高介电常数栅极绝缘体和金属栅极(HKMG)
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申请号: US12757323申请日: 2010-04-09
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公开(公告)号: US08350341B2公开(公告)日: 2013-01-08
- 发明人: Michael P. Chudzik , William K. Henson , Unoh Kwon
- 申请人: Michael P. Chudzik , William K. Henson , Unoh Kwon
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Whitham, Curtis, Christofferson & Cook, P.C.
- 代理商 Joseph P. Abate
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Adjustment of a switching threshold of a field effect transistor including a gate structure including a Hi-K gate dielectric and a metal gate is achieved and switching thresholds coordinated between NFETs and PFETs by providing fixed charge materials in a thin interfacial layer adjacent to the conduction channel of the transistor that is provided for adhesion of the Hi-K material, preferably hafnium oxide or HfSiON, depending on design, to semiconductor material rather than diffusing fixed charge material into the Hi-K material after it has been applied. The greater proximity of the fixed charge material to the conduction channel of the transistor increases the effectiveness of fixed charge material to adjust the threshold due to the work function of the metal gate, particularly where the same metal or alloy is used for both NFETs and PFETs in an integrated circuit; preventing the thresholds from being properly coordinated.
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