Invention Grant
US08350341B2 Method and structure for work function engineering in transistors including a high dielectric constant gate insulator and metal gate (HKMG)
有权
晶体管中工作功能工程的方法和结构包括高介电常数栅极绝缘体和金属栅极(HKMG)
- Patent Title: Method and structure for work function engineering in transistors including a high dielectric constant gate insulator and metal gate (HKMG)
- Patent Title (中): 晶体管中工作功能工程的方法和结构包括高介电常数栅极绝缘体和金属栅极(HKMG)
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Application No.: US12757323Application Date: 2010-04-09
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Publication No.: US08350341B2Publication Date: 2013-01-08
- Inventor: Michael P. Chudzik , William K. Henson , Unoh Kwon
- Applicant: Michael P. Chudzik , William K. Henson , Unoh Kwon
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Whitham, Curtis, Christofferson & Cook, P.C.
- Agent Joseph P. Abate
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
Adjustment of a switching threshold of a field effect transistor including a gate structure including a Hi-K gate dielectric and a metal gate is achieved and switching thresholds coordinated between NFETs and PFETs by providing fixed charge materials in a thin interfacial layer adjacent to the conduction channel of the transistor that is provided for adhesion of the Hi-K material, preferably hafnium oxide or HfSiON, depending on design, to semiconductor material rather than diffusing fixed charge material into the Hi-K material after it has been applied. The greater proximity of the fixed charge material to the conduction channel of the transistor increases the effectiveness of fixed charge material to adjust the threshold due to the work function of the metal gate, particularly where the same metal or alloy is used for both NFETs and PFETs in an integrated circuit; preventing the thresholds from being properly coordinated.
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