发明授权
- 专利标题: Optical element module with minimized parasitic loads
- 专利标题(中): 具有最小化寄生负载的光学元件模块
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申请号: US12708034申请日: 2010-02-18
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公开(公告)号: US08351139B2公开(公告)日: 2013-01-08
- 发明人: Jens Kugler , Ulrich Weber , Dirk Schaffer
- 申请人: Jens Kugler , Ulrich Weber , Dirk Schaffer
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G02B7/02
- IPC分类号: G02B7/02
摘要:
An optical element module is provided. The optical module includes an optical element unit that includes an optical element and a support structure that supports the optical element unit. The support structure includes a support device and a contact device mounted to the support device. The contact device exerts a force on the optical element unit in a first direction via a first contact surface of the contact device. The first contact surface contacts a second contact surface of the optical element unit. The contact device includes a first linking section and a second linking section extending along a second direction running transverse to the first direction and arranged kinematically in series between the first contact surface and the support device. The first linking section and the second linking section are elastically deformed in response to a bending moment resulting from the force. The first linking section and the second linking section are arranged on opposite sides of a reference plane. The reference plane includes the force and runs transverse to the second direction.
公开/授权文献
- US20100214675A1 OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS 公开/授权日:2010-08-26
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |