发明授权
US08353213B2 Sensor element for sensing accelerations in three spatial directions
有权
用于感测三个空间方向的加速度的传感器元件
- 专利标题: Sensor element for sensing accelerations in three spatial directions
- 专利标题(中): 用于感测三个空间方向的加速度的传感器元件
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申请号: US12678669申请日: 2008-09-19
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公开(公告)号: US08353213B2公开(公告)日: 2013-01-15
- 发明人: Jochen Zoellin , Axel Franke , Kathrin Van Teeffelen , Christina Leinenbach
- 申请人: Jochen Zoellin , Axel Franke , Kathrin Van Teeffelen , Christina Leinenbach
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102007046017 20070926
- 国际申请: PCT/EP2008/062525 WO 20080919
- 国际公布: WO2009/043738 WO 20090409
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P15/08
摘要:
A sensor element is provided for sensing accelerations in three spatial directions, which furnishes reliable measurement results and moreover can be implemented economically and with a small configuration. The sensor element encompasses at least one seismic mass deflectable in three spatial directions, a diaphragm structure that functions as a suspension mount for the seismic mass, and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure. According to the exemplary embodiments and/or exemplary methods of the present invention, the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass.
公开/授权文献
- US20100206076A1 SENSOR ELEMENT 公开/授权日:2010-08-19
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