Invention Grant
US08353600B1 MEMS actuator assembly for optical switch 有权
用于光开关的MEMS致动器组件

MEMS actuator assembly for optical switch
Abstract:
A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.
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