- 专利标题: Semiconductor device and method of forming conductive posts embedded in photosensitive encapsulant
-
申请号: US12329430申请日: 2008-12-05
-
公开(公告)号: US08354304B2公开(公告)日: 2013-01-15
- 发明人: Seng Guan Chow , Il Kwon Shim , Heap Hoe Kuan , Rui Huang
- 申请人: Seng Guan Chow , Il Kwon Shim , Heap Hoe Kuan , Rui Huang
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins & Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A semiconductor package includes a post carrier having a base plate and plurality of conductive posts. A photosensitive encapsulant is deposited over the base plate of the post carrier and around the conductive posts. The photosensitive encapsulant is etched to expose a portion of the base plate of the post carrier. A semiconductor die is mounted to the base plate of the post carrier within the etched portions of the photosensitive encapsulant. A second encapsulant is deposited over the semiconductor die. A first circuit build-up layer is formed over the second encapsulant. The first circuit build-up layer is electrically connected to the conductive posts. The base plate of the post carrier is removed and a second circuit build-up layer is formed over the semiconductor die and the photosensitive encapsulant opposite the first circuit build-up layer. The second circuit build-up layer is electrically connected to the conductive posts.
公开/授权文献
信息查询
IPC分类: