发明授权
US08355423B2 VCSEL with non-circular mesa and current confinement aperture for higher order lateral mode emission
有权
具有非圆形台面和电流限制孔径的VCSEL用于高阶横向模式发射
- 专利标题: VCSEL with non-circular mesa and current confinement aperture for higher order lateral mode emission
- 专利标题(中): 具有非圆形台面和电流限制孔径的VCSEL用于高阶横向模式发射
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申请号: US13121885申请日: 2009-09-30
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公开(公告)号: US08355423B2公开(公告)日: 2013-01-15
- 发明人: Michael Moser , Sven Eitel , Wolfgang Kaiser
- 申请人: Michael Moser , Sven Eitel , Wolfgang Kaiser
- 申请人地址: GB Towcester
- 专利权人: Oclaro Technology Limited
- 当前专利权人: Oclaro Technology Limited
- 当前专利权人地址: GB Towcester
- 代理机构: Fenwick & West LLP
- 优先权: GB0817786.7 20080930
- 国际申请: PCT/GB2009/051281 WO 20090930
- 国际公布: WO2010/038067 WO 20100408
- 主分类号: H01S5/00
- IPC分类号: H01S5/00
摘要:
A vertical cavity surface emitting laser (VCSEL) (100) has a substrate (104), on which are disposed first and second distributed Bragg reflectors (DBRs) (106, 112), each DBR comprising a stack of layers of alternating refractive index, an active layer (108) disposed between the DBRs, and an aperture layer (110) disposed either between the DBRs or within one of the DBRs. The aperture layer (110) has a border (116) having an internal boundary with a plurality of indented portions defining one or more apertures. Such a VCSEL is easily manufacturable and provides a narrow bandwidth output, as well as mitigating at least some of the problems of prior art VCSELs. Mesa (102) may be etched to be non-circular and subsequent selective oxidation of aperture layer (110) results in a non-circular current confinement aperture (114) promoting higher-order lateral modes (LP21).
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