Invention Grant
- Patent Title: Techniques for providing a multimode ion source
- Patent Title (中): 提供多模离子源的技术
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Application No.: US12708216Application Date: 2010-02-18
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Publication No.: US08357912B2Publication Date: 2013-01-22
- Inventor: Svetlana Radovanov , Bon-Woong Koo , Frank Sinclair , Victor Benveniste
- Applicant: Svetlana Radovanov , Bon-Woong Koo , Frank Sinclair , Victor Benveniste
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/08
- IPC: H01J37/08
Abstract:
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.
Public/Granted literature
- US20100148088A1 TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE Public/Granted day:2010-06-17
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