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Invention Grant
US08357981B2 Transducer devices having different frequencies based on layer thicknesses and method of fabricating the same 有权
基于层厚的具有不同频率的传感器装置及其制造方法

Transducer devices having different frequencies based on layer thicknesses and method of fabricating the same
Abstract:
A transducer array on a common substrate includes a membrane and first and second transducer devices. The membrane is formed on the common substrate, and includes a lower layer and an upper layer. The first transducer device includes a first resonator stack formed on at least the lower layer in a first portion of the membrane, the upper layer having a first thickness in the first portion of the membrane. The second transducer device includes a second resonator stack formed on at least the lower layer in a second portion of the membrane, the upper layer having a second thickness in the second portion of the membrane, where the second thickness is different from the first thickness, such that a first resonant frequency of the first transducer device is different from a second resonant frequency of the second transducer device.
Abstract(Chinese):

公共衬底上的换能器阵列包括膜和第一和第二换能器装置。 膜形成在公共基板上，并且包括下层和上层。 第一换能器装置包括形成在膜的第一部分中的至少下层上的第一谐振器叠层，上层在膜的第一部分具有第一厚度。 第二换能器装置包括形成在膜的第二部分中的至少下层上的第二谐振器叠层，上层在膜的第二部分具有第二厚度，其中第二厚度不同于第一厚度， 使得第一换能器装置的第一谐振频率与第二换能器装置的第二共振频率不同。

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