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40 条记录 (耗时 0.023 秒)

    Polarity determining seed layer and method of fabricating piezoelectric materials with specific C-axis
    1.
    发明授权
    Polarity determining seed layer and method of fabricating piezoelectric materials with specific C-axis 有权

    公开(公告)号：US09847768B2

    公开(公告)日：2017-12-19

    申请号：US12623746

    申请日：2009-11-23

    申请人： Kevin Grannen ,  Chris Feng ,  John Choy

    发明人： Kevin Grannen ,  Chris Feng ,  John Choy

    IPC分类号： H03H9/02 ,  C30B23/02 ,  C30B25/02 ,  C30B29/40

    CPC分类号： H03H9/02015 ,  C30B23/02 ,  C30B25/02 ,  C30B29/406 ,  Y10T29/42

    摘要： An acoustic resonator comprises a first electrode, a second electrode and a piezoelectric layer disposed between the first electrode and the second electrode, and comprising a C-axis having an orientation. A polarization-determining seed layer (PDSL) is disposed beneath the piezoelectric layer, the seed layer comprising a metal-nonmetal compound. A method of fabricating a piezoelectric layer over a substrate comprises forming a first layer of a polarization determining seed layer (PDSL) over the substrate. The method further comprises forming a second layer of the PDSL over the first layer. The method further comprises forming a first layer of a piezoelectric material over the second layer of the PDSL; and forming a second layer of the piezoelectric material over the first layer of the piezoelectric material. The piezoelectric material comprises a compression axis (C-axis) oriented along a first direction.

    Electrostatic bonding of a die substrate to a package substrate
    3.
    发明授权
    Electrostatic bonding of a die substrate to a package substrate 有权
    模具基板与封装基板的静电接合

    公开(公告)号：US08384269B2

    公开(公告)日：2013-02-26

    申请号：US12908047

    申请日：2010-10-20

    申请人： David Martin ,  John Choy

    发明人： David Martin ,  John Choy

    IPC分类号： H03H9/15

    CPC分类号： H03H9/02102 ,  H03H9/02133 ,  H03H9/1014

    摘要： A transducer apparatus comprises a package substrate and a transducer disposed over a die substrate. The die substrate is disposed over the package substrate. The transducer apparatus also comprises a voltage source connected between the die substrate and the package substrate, and configured to selectively apply an electrostatic attractive force between the die substrate and the package substrate.

    摘要翻译： 传感器装置包括封装基板和设置在管芯基板上的换能器。 芯片基板设置在封装基板上。 换能器装置还包括连接在管芯衬底和封装衬底之间的电压源，并被配置为在管芯衬底和封装衬底之间选择性施加静电引力。

    MICROMACHINED HORN
    5.
    发明申请
    MICROMACHINED HORN 有权

    公开(公告)号：US20120269372A1

    公开(公告)日：2012-10-25

    申请号：US13536917

    申请日：2012-06-28

    申请人： David MARTIN ,  Joel PHILLIBER ,  John CHOY

    发明人： David MARTIN ,  Joel PHILLIBER ,  John CHOY

    IPC分类号： H04R1/20 ,  H04R1/02

    CPC分类号： H04R1/30 ,  H01L27/20 ,  H04R17/005 ,  H04R2201/003 ,  Y10T29/42

    摘要： An acoustic device includes a transducer formed on a first surface of a substrate and an acoustic horn formed in the substrate by a dry-etching process through an opposing second surface of the substrate. The acoustic horn is positioned to amplify sound waves from the transducer and defines a non-linear cross-sectional profile.

    摘要翻译： 声学装置包括通过基板的相对的第二表面的干蚀刻工艺形成在基板的第一表面上的换能器和形成在基板中的声喇叭。 声喇叭被定位成放大来自换能器的声波并且限定非线性横截面轮廓。

    Acoustic resonator structure comprising a bridge
    7.
    发明授权
    Acoustic resonator structure comprising a bridge 有权
    包括桥梁的声谐振器结构

    公开(公告)号：US08248185B2

    公开(公告)日：2012-08-21

    申请号：US12490525

    申请日：2009-06-24

    申请人： John Choy ,  Chris Feng ,  Phil Nikkel

    发明人： John Choy ,  Chris Feng ,  Phil Nikkel

    IPC分类号： H03H9/15 ,  H03H9/13 ,  H03H9/52 ,  H03H9/54

    CPC分类号： H03H9/02149 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/173

    摘要： An acoustic resonator comprises a first electrode a second electrode and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator further comprises a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator.

    摘要翻译： 声谐振器包括第一电极，第二电极和设置在第一和第二电极之间的压电层。 声谐振器还包括设置在第一电极，第二电极和压电层下方的反射元件。 反射元件，第一电极，第二电极和压电层的重叠包括声谐振器的有效区域。 声谐振器还包括与声谐振器的有源区域的终端相邻的桥。

    ACOUSTIC RESONATOR STRUCTURE COMPRISING A BRIDGE
    8.
    发明申请
    ACOUSTIC RESONATOR STRUCTURE COMPRISING A BRIDGE 审中-公开
    包含桥梁的声学谐振器结构

    公开(公告)号：US20120206015A1

    公开(公告)日：2012-08-16

    申请号：US13445268

    申请日：2012-04-12

    申请人： John CHOY ,  Chris FENG ,  Phil NIKKEL

    发明人： John CHOY ,  Chris FENG ,  Phil NIKKEL

    IPC分类号： H01L41/08 ,  B05D5/12

    CPC分类号： H03H9/02149 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/173

    摘要： An acoustic resonator comprises a first electrode a second electrode and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator further comprises a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator.

    摘要翻译： 声谐振器包括第一电极，第二电极和设置在第一和第二电极之间的压电层。 声谐振器还包括设置在第一电极，第二电极和压电层下方的反射元件。 反射元件，第一电极，第二电极和压电层的重叠包括声谐振器的有效区域。 声谐振器还包括与声谐振器的有源区域的终端相邻的桥。

    ACOUSTIC RESONATOR STRUCTURE COMPRISING A BRIDGE
    9.
    发明申请
    ACOUSTIC RESONATOR STRUCTURE COMPRISING A BRIDGE 审中-公开

    公开(公告)号：US20120194297A1

    公开(公告)日：2012-08-02

    申请号：US13443113

    申请日：2012-04-10

    申请人： John CHOY ,  Chris FENG ,  Phil NIKKEL

    发明人： John CHOY ,  Chris FENG ,  Phil NIKKEL

    IPC分类号： H03H9/15 ,  H01L41/04

    CPC分类号： H03H9/02149 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/173

    摘要： An acoustic resonator comprises a first electrode a second electrode and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator further comprises a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator.

    POLARITY DETERMINING SEED LAYER AND METHOD OF FABRICATING PIEZOELECTRIC MATERIALS WITH SPECIFIC C-AXIS
    10.
    发明申请
    POLARITY DETERMINING SEED LAYER AND METHOD OF FABRICATING PIEZOELECTRIC MATERIALS WITH SPECIFIC C-AXIS 有权
    极性测定种子层和制备具有特定C轴的压电材料的方法

    公开(公告)号：US20110121689A1

    公开(公告)日：2011-05-26

    申请号：US12623746

    申请日：2009-11-23

    申请人： Kevin Grannen ,  Chris Feng ,  John Choy

    发明人： Kevin Grannen ,  Chris Feng ,  John Choy

    IPC分类号： H01L41/04 ,  H01L41/22

    CPC分类号： H03H9/02015 ,  C30B23/02 ,  C30B25/02 ,  C30B29/406 ,  Y10T29/42

    摘要： An acoustic resonator comprises a first electrode, a second electrode and a piezoelectric layer disposed between the first electrode and the second electrode, and comprising a C-axis having an orientation. A polarization-determining seed layer (PDSL) is disposed beneath the piezoelectric layer, the seed layer comprising a metal-nonmetal compound. A method of fabricating a piezoelectric layer over a substrate comprises forming a first layer of a polarization determining seed layer (PDSL) over the substrate. The method further comprises forming a second layer of the PDSL over the first layer. The method further comprises forming a first layer of a piezoelectric material over the second layer of the PDSL; and forming a second layer of the piezoelectric material over the first layer of the piezoelectric material. The piezoelectric material comprises a compression axis (C-axis) oriented along a first direction.

    摘要翻译： 声谐振器包括第一电极，第二电极和设置在第一电极和第二电极之间的压电层，并且包括具有取向的C轴。 偏振确定种子层（PDSL）设置在压电层下方，种子层包含金属 - 非金属化合物。 在衬底上制造压电层的方法包括在衬底上形成偏振确定种子层（PDSL）的第一层。 该方法还包括在第一层上形成PDSL的第二层。 该方法还包括在PDSL的第二层上形成压电材料的第一层; 以及在所述压电材料的所述第一层上形成所述压电材料的第二层。 压电材料包括沿着第一方向取向的压缩轴线（C轴）。