Invention Grant
US08360753B2 Micro fluidic transportation device and method for manufacturing the same 有权
微流体运输装置及其制造方法

Micro fluidic transportation device and method for manufacturing the same
Abstract:
Provided is a micro fluidic transportation device capable of controlling discontinuous transportation of micro droplets using surface acoustic wave (SAW), and a method for manufacturing the same. The micro fluidic transportation device which includes: a substrate; a piezoelectric layer formed on the substrate; an inter digitated transducer (IDT) electrode formed on the piezoelectric layer for energy conversion by generating a surface acoustic wave (SAW); and a fluid passage formed on the piezoelectric thin layer.
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