Invention Grant
- Patent Title: Method of manufacturing vertical gallium nitride based light emitting diode
- Patent Title (中): 制造垂直氮化镓基发光二极管的方法
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Application No.: US11634106Application Date: 2006-12-06
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Publication No.: US08361816B2Publication Date: 2013-01-29
- Inventor: Jae Hoon Lee , Jung Hee Lee , Hyun Ick Cho , Dae Kil Kim , Jae Chul Ro
- Applicant: Jae Hoon Lee , Jung Hee Lee , Hyun Ick Cho , Dae Kil Kim , Jae Chul Ro
- Applicant Address: KR Seoul
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2005-0120599 20051209
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing a vertical GaN-based LED includes forming a nitride-based buffer layer on a silicon substrate; sequentially forming a p-type GaN layer, an active layer, and an n-type GaN layer on the nitride-based buffer layer; forming an n-electrode on the n-type GaN layer; forming a plating seed layer on the n-electrode; forming a structure supporting layer on the plating seed layer; removing the silicon substrate through wet etching and forming roughness on the surface of the p-type GaN layer through over-etching; and forming a p-electrode on the p-type GaN layer having the roughness formed.
Public/Granted literature
- US20070134834A1 Method of manufacturing vertical gallium nitride based light emitting diode Public/Granted day:2007-06-14
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