发明授权
- 专利标题: Field effect device having a channel of nanofabric and methods of making same
- 专利标题(中): 具有纳米通道的场效应器件及其制造方法
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申请号: US11332529申请日: 2006-01-13
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公开(公告)号: US08362525B2公开(公告)日: 2013-01-29
- 发明人: Claude L. Bertin , Mitchell Meinhold , Steven L. Konsek , Thomas Rueckes , Frank Guo
- 申请人: Claude L. Bertin , Mitchell Meinhold , Steven L. Konsek , Thomas Rueckes , Frank Guo
- 申请人地址: US MA Woburn
- 专利权人: Nantero Inc.
- 当前专利权人: Nantero Inc.
- 当前专利权人地址: US MA Woburn
- 代理机构: Nantero Inc.
- 主分类号: H01L21/335
- IPC分类号: H01L21/335 ; H01L21/336 ; H01L29/76
摘要:
Field effect devices having channels of nanofabric and methods of making same. A nanotube field effect transistor is made to have a substrate, and a drain region and a source region in spaced relation relative to each other. A channel region is formed from a fabric of nanotubes, in which the nanotubes of the channel region are substantially all of the same semiconducting type of nanotubes. At least one gate is formed in proximity to the channel region so that the gate may be used to modulate the conductivity of the channel region so that a conductive path may be formed between the drain and source region. Forming a channel region includes forming a fabric of nanotubes in which the fabric has both semiconducting and metallic nanotubes and the fabric is processed to remove substantially all of the metallic nanotubes.
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