发明授权
- 专利标题: Catadioptric projection objective with mirror group
- 专利标题(中): 反射折射投影物镜与镜组
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申请号: US11578101申请日: 2005-04-07
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公开(公告)号: US08363315B2公开(公告)日: 2013-01-29
- 发明人: Alexander Epple , Wilhelm Ulrich , Aurelian Dodoc , Hans-Juergen Mann , David Shafer
- 申请人: Alexander Epple , Wilhelm Ulrich , Aurelian Dodoc , Hans-Juergen Mann , David Shafer
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 国际申请: PCT/EP2005/003645 WO 20050407
- 国际公布: WO2005/098505 WO 20051020
- 主分类号: G02B17/00
- IPC分类号: G02B17/00
摘要:
A catadioptric projection objective for imaging an off-axis object field arranged in an object surface of the projection objective onto an off-axis image field arranged in an image surface of the projection objective has a front lens group, a mirror group comprising four mirrors and having an object side mirror group entry, an image side mirror group exit, and a mirror group plane aligned transversely to the optical axis and arranged geometrically between the mirror group entry and the mirror group exit; and a rear lens group. The mirrors of the mirror group are arranged such that at least one intermediate image is positioned inside the mirror group between mirror group entry and mirror group exit, and that radiation coming from the mirror group entry passes at least four times through the mirror group plane and is reflected at least twice on a concave mirror surface of the mirror group prior to exiting the mirror group at the mirror group exit. The mirror group entry is positioned in a region where radiation exiting the front lens group has an entry chief ray height. A second reflecting area is positioned in a region where radiation impinging on the second mirror has a second chief ray height deviating from the entry chief ray height in a first direction; and a fourth reflecting area is positioned in a region where radiation impinging on the fourth mirror has a fourth chief ray height deviating from the entry chief ray height in a second direction opposite to the first direction.
公开/授权文献
- US20110261444A1 Catadioptric Projection Objective With Mirror Group 公开/授权日:2011-10-27
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |