发明授权
- 专利标题: Low ejection energy micro-fluid ejection heads
- 专利标题(中): 低喷射能量微流体喷射头
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申请号: US12758161申请日: 2010-04-12
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公开(公告)号: US08366952B2公开(公告)日: 2013-02-05
- 发明人: Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
- 申请人: Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
- 申请人地址: US KY Lexington
- 专利权人: Lexmark International, Inc.
- 当前专利权人: Lexmark International, Inc.
- 当前专利权人地址: US KY Lexington
- 主分类号: G01D15/00
- IPC分类号: G01D15/00 ; G11B5/127
摘要:
A micro-fluid ejection device structure and method therefor having improved low energy design. The devices include a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAl, Ta2N, TaAl(O,N), TaAlSi, Ti(N,O), WSi(O,N), TaAlN, and TaAl/TaAlN. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.
公开/授权文献
- US20100213165A1 LOW EJECTION ENERGY MICRO-FLUID EJECTION HEADS 公开/授权日:2010-08-26