Invention Grant
- Patent Title: Single-source precursor and methods therefor
- Patent Title (中): 单源前体及其方法
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Application No.: US12727313Application Date: 2010-03-19
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Publication No.: US08367866B2Publication Date: 2013-02-05
- Inventor: Wayde R. Schmidt
- Applicant: Wayde R. Schmidt
- Applicant Address: US CT Hartford
- Assignee: United Technologies Corporation
- Current Assignee: United Technologies Corporation
- Current Assignee Address: US CT Hartford
- Agency: Carlson, Gaskey & Olds PC
- Main IPC: C07F5/02
- IPC: C07F5/02 ; C23C16/00
Abstract:
A single-source precursor composition includes R3B.NX3, where B is boron, N is nitrogen, and the R groups and the X groups are selected from hydrogen, alkyl groups, and aryl groups. At least one of the R groups is an alkyl group or an aryl group.
Public/Granted literature
- US20110230677A1 SINGLE-SOURCE PRECURSOR AND METHODS THEREFOR Public/Granted day:2011-09-22
Information query
