发明授权
- 专利标题: Mesa semiconductor device and method of manufacturing the same
- 专利标题(中): 梅萨半导体器件及其制造方法
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申请号: US12338694申请日: 2008-12-18
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公开(公告)号: US08368181B2公开(公告)日: 2013-02-05
- 发明人: Akira Suzuki , Katsuyuki Seki , Keita Odajima
- 申请人: Akira Suzuki , Katsuyuki Seki , Keita Odajima
- 申请人地址: JP Ora-gun JP Ojiya-shi US AZ Phoenix
- 专利权人: SANYO Semiconductor Co., Ltd.,SANYO Semiconductor Manufacturing Co., Ltd.,Semiconductor Components Industries, LLC
- 当前专利权人: SANYO Semiconductor Co., Ltd.,SANYO Semiconductor Manufacturing Co., Ltd.,Semiconductor Components Industries, LLC
- 当前专利权人地址: JP Ora-gun JP Ojiya-shi US AZ Phoenix
- 代理机构: Morrison & Foerster LLP
- 优先权: JP2007-332702 20071225
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L27/082 ; H01L27/102 ; H01L29/70 ; H01L31/11
摘要:
The invention provides a mesa semiconductor device and a method of manufacturing the same which enhance the yield and productivity. An N− type semiconductor layer is formed on a front surface of a semiconductor substrate, and a P type semiconductor layer is formed thereon. An anode electrode is further formed on the P type semiconductor layer so as to be connected to the P type semiconductor layer, and a mesa groove is formed from the front surface of the P type semiconductor layer deeper than the N− type semiconductor layer so as to surround the anode electrode. Then, a second insulation film is formed from inside the mesa groove onto the P type semiconductor layer on the outside of the mesa groove. The second insulation film is made of an organic insulator such as polyimide type resin or the like. The lamination body made of the semiconductor substrate and the layers laminated thereon is then diced along a scribe line.
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