发明授权
- 专利标题: Polarization actuator
- 专利标题(中): 极化执行机构
-
申请号: US13281179申请日: 2011-10-25
-
公开(公告)号: US08373847B2公开(公告)日: 2013-02-12
- 发明人: Michael Patra , Martin Meier
- 申请人: Michael Patra , Martin Meier
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102010042901 20101026
- 主分类号: G03B27/72
- IPC分类号: G03B27/72 ; G03B27/54
摘要:
The present invention relates to an apparatus for influencing a light beam arrangement comprising a plurality of light beams (4) arranged alongside one another, wherein provision is made of at least one optical element (5, 15, 25) which is movable transversely with respect to the light beams and by which the light beams can be influenced if the light beams pass through the optical element, and which has at least one light-absorbing region (9, 19, 29), wherein the apparatus comprises a drive device for the optical element, a measuring device for detecting the light of the light beam and a control unit, wherein the control unit is designed such that the drive device is controlled in a manner dependent on the position of the light-absorbing region. Furthermore, the present invention also relates to a projection exposure apparatus for microlithography comprising a multi-mirror array, in which the corresponding apparatus can be used, and to a method for operating the corresponding apparatus or the projection exposure apparatus.
公开/授权文献
- US20120099093A1 POLARIZATION ACTUATOR 公开/授权日:2012-04-26
信息查询