Invention Grant
- Patent Title: Capacitive MEMS gyroscope and method of making the same
- Patent Title (中): 电容式MEMS陀螺仪及其制作方法
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Application No.: US12834250Application Date: 2010-07-12
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Publication No.: US08375791B2Publication Date: 2013-02-19
- Inventor: Herb He Huang
- Applicant: Herb He Huang
- Applicant Address: CN Shanghai
- Assignee: Shanghai Lexvu Opto Microelectronics Technology Co., Ltd.
- Current Assignee: Shanghai Lexvu Opto Microelectronics Technology Co., Ltd.
- Current Assignee Address: CN Shanghai
- Agency: J.C. Patents
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A capacitive MEMS gyroscope and a method of making the same are disclosed. The capacitive MEMS gyroscope comprises a semiconductor substrate and a suspended composite wheel. The semiconductor substrate comprises: a read-out circuitry; at least one bottom electrode disposed on top of the semiconductor substrate, centered to a rotation axis and electrically connected to the read-out circuitry; at least one contact pad disposed on the top of the semiconductor substrate, electrically to the read-out circuitry; the composite wheel, partially made of dielectric film and configured in suspension above and in parallel to the semiconductor substrate and centered to the rotation axis, comprises: at least one top electrode disposed on the composite wheel, aligned vertically with one of the bottom electrode, electrically to the read-out circuitry; at least one circumferential spring centered to the rotation axis, bridging the composite wheel and the semiconductor substrate and consisting of at least one top electrode which electrically connects the top electrode to the contact pad on the semiconductor substrate. The gyroscope of the present invention formed by depositing and photolithographically patterning has miniaturized size, low tolerance scope and high sensing accuracy, as well as low fabrication costs owing to special bulk MEMS fabrication device unnecessary.
Public/Granted literature
- US20110005319A1 CAPACITIVE MEMS GYROSCOPE AND METHOD OF MAKING THE SAME Public/Granted day:2011-01-13
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