发明授权
- 专利标题： Apparatus for forming films on substrates
- 专利标题（中）： 用于在基片上形成薄膜的装置
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申请号： US12599061申请日： 2007-05-07
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公开(公告)号： US08375888B2公开(公告)日： 2013-02-19
- 发明人: Stephen Mark Lambert , Dennis Mullins , Cuong Manh Ta , Peter Wing Leung
- 申请人： Stephen Mark Lambert , Dennis Mullins , Cuong Manh Ta , Peter Wing Leung
- 申请人地址： US CA San Jose
- 专利权人： Intermolecular, Inc.
- 当前专利权人： Intermolecular, Inc.
- 当前专利权人地址： US CA San Jose
- 国际申请： PCT/US2007/068375 WO 20070507
- 国际公布： WO2008/136833 WO 20081113
- 主分类号： B05C11/04
- IPC分类号： B05C11/04
摘要：
A doctor blade assembly for use in combination with apparatus for forming a film on a substrate. The doctor blade assembly includes a doctor blade to be mounted on a programmable robot. The doctor blade has a bottom face and spacers at opposite ends of the body of the doctor blade extending a predetermined distance down below the bottom face of the body for contacting a substrate and spacing the bottom face from the substrate. The spacers are adjustable relative to the doctor blade for adjusting the predetermined distance according to the thickness of film to be formed on the substrate. Other aspects and methods are also disclosed.
公开/授权文献
- US20100221439A1 APPARATUS FOR FORMING FILMS ON SUBSTRATES 公开/授权日：2010-09-02
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