Invention Grant
US08377730B2 Method of manufacturing vertically aligned nanotubes, method of manufacturing sensor structure, and sensor element manufactured thereby
有权
制造垂直排列的纳米管的方法,制造传感器结构的方法和由此制造的传感器元件
- Patent Title: Method of manufacturing vertically aligned nanotubes, method of manufacturing sensor structure, and sensor element manufactured thereby
- Patent Title (中): 制造垂直排列的纳米管的方法,制造传感器结构的方法和由此制造的传感器元件
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Application No.: US12647777Application Date: 2009-12-28
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Publication No.: US08377730B2Publication Date: 2013-02-19
- Inventor: Seung Yun Yang , Gumhye Jeon , Hyungjun Kim , Jong Yeog Son , Chang-Soo Lee , Jin Kon Kim , Jinseok Byun
- Applicant: Seung Yun Yang , Gumhye Jeon , Hyungjun Kim , Jong Yeog Son , Chang-Soo Lee , Jin Kon Kim , Jinseok Byun
- Applicant Address: KR Pohang
- Assignee: Postech Academy-Industry Foundation
- Current Assignee: Postech Academy-Industry Foundation
- Current Assignee Address: KR Pohang
- Agency: Sherr & Jiang, PLLC
- Priority: KR10-2009-0065446 20090717
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/461

Abstract:
Provided is a method of manufacturing a sensor structure, where vertically-well-aligned nanotubes are formed and the sensor structure having an excellent performance can be manufactured at the room temperature at low cost by using the nanotubes. The method of manufacturing a sensor structure includes: (a) forming a lower electrode on a substrate; (b) forming an organic template having a pore structure on the lower electrode; (c) forming a metal oxide thin film in the organic template; (d) forming a metal oxide nanotube structure, in which nanotubes are vertically aligned and upper portions thereof are connected to each other, by removing the organic template through a dry etching method; and (e) forming an upper electrode on the upper portions of the nanotubes.
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