Invention Grant
- Patent Title: Methods of preparing flexible photovoltaic devices using epitaxial liftoff, and preserving the integrity of growth substrates used in epitaxial growth
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Application No.: US12878261Application Date: 2010-09-09
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Publication No.: US08378385B2Publication Date: 2013-02-19
- Inventor: Stephen R. Forrest , Jeramy Zimmerman , Kyusang Lee , Kuen-Ting Shiu
- Applicant: Stephen R. Forrest , Jeramy Zimmerman , Kyusang Lee , Kuen-Ting Shiu
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of the University of Michigan
- Current Assignee: The Regents of the University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/302 ; H01L31/0352
Abstract:
There is disclosed methods of making photosensitive devices, such as flexible photovoltaic (PV) devices, through the use of epitaxial liftoff. Also described herein are methods of preparing flexible PV devices comprising a structure having a growth substrate, wherein the selective etching of protective layers yields a smooth growth substrate that us suitable for reuse.
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