发明授权
- 专利标题: Semiconductor storage device
- 专利标题(中): 半导体存储设备
-
申请号: US12699647申请日: 2010-02-03
-
公开(公告)号: US08378425B2公开(公告)日: 2013-02-19
- 发明人: Fujio Masuoka , Shintaro Arai
- 申请人: Fujio Masuoka , Shintaro Arai
- 申请人地址: SG Peninsula Plaza
- 专利权人: Unisantis Electronics Singapore Pte Ltd.
- 当前专利权人: Unisantis Electronics Singapore Pte Ltd.
- 当前专利权人地址: SG Peninsula Plaza
- 代理机构: Brinks Hofer Gilson & Lione
- 优先权: WOPCT/JP2008/051301 20080129
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L21/8244
摘要:
It is intended to achieve a sufficiently-small SRAM cell area and a stable operation margin in a CMOS 6T-SRAM comprising a vertical transistor SGT. In a static type memory cell made up using six MOS transistors, each of the MOS transistor constituting the memory cell is formed on a planar silicon layer formed on a buried oxide film, to have a structure where a drain, a gate and a source are arranged in a vertical direction, wherein the gate is formed to surround a pillar-shaped semiconductor layer. The planar silicon layer comprises a first active region having a first conductive type, and a second active region having a second conductive type. The first and second active regions are connected to each other through a silicide layer formed in a surface of the planar silicon layer to achieve an SRAM cell having a sufficiently-small area.
公开/授权文献
- US20100219483A1 SEMICONDUCTOR STORAGE DEVICE 公开/授权日:2010-09-02
信息查询
IPC分类: