Invention Grant
- Patent Title: Method for adjusting an acceleration sensor
- Patent Title (中): 调整加速度传感器的方法
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Application No.: US12927345Application Date: 2010-11-12
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Publication No.: US08381570B2Publication Date: 2013-02-26
- Inventor: Torsten Ohms , Axel Franke
- Applicant: Torsten Ohms , Axel Franke
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009047018 20091123
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01P15/18

Abstract:
A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.
Public/Granted literature
- US20110120208A1 Method for adjusting an acceleration sensor, and acceleration sensor Public/Granted day:2011-05-26
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