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    YAW-RATE SENSOR
    2.
    发明申请
    YAW-RATE SENSOR 审中-公开
    YAW-RATE传感器

    公开(公告)号：US20140326070A1

    公开(公告)日：2014-11-06

    申请号：US14334407

    申请日：2014-07-17

    申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC分类号： G01P3/44 ,  F16F1/02 ,  G01C19/574

    CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

    Method for adjusting an acceleration sensor
    3.
    发明授权
    Method for adjusting an acceleration sensor 有权
    调整加速度传感器的方法

    公开(公告)号：US08381570B2

    公开(公告)日：2013-02-26

    申请号：US12927345

    申请日：2010-11-12

    申请人： Torsten Ohms ,  Axel Franke

    发明人： Torsten Ohms ,  Axel Franke

    IPC分类号： G01P21/00 ,  G01P15/18

    CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

    摘要： A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

    摘要翻译： 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

    YAW-RATE SENSOR
    4.
    发明申请
    YAW-RATE SENSOR 有权
    YAW-RATE传感器

    公开(公告)号：US20120060604A1

    公开(公告)日：2012-03-15

    申请号：US12734228

    申请日：2008-10-02

    申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC分类号： G01P3/44 ,  F16F3/00

    CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

    Method for adjusting an acceleration sensor, and acceleration sensor
    5.
    发明申请
    Method for adjusting an acceleration sensor, and acceleration sensor 有权
    调整加速度传感器和加速度传感器的方法

    公开(公告)号：US20110120208A1

    公开(公告)日：2011-05-26

    申请号：US12927345

    申请日：2010-11-12

    申请人： Torsten Ohms ,  Axel Franke

    发明人： Torsten Ohms ,  Axel Franke

    IPC分类号： G01P21/00 ,  G01P15/125

    CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

    摘要： A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

    摘要翻译： 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

    HYBRID INTERGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
    6.
    发明申请
    HYBRID INTERGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF 有权
    混合互联组件及其制造方法

    公开(公告)号：US20130299927A1

    公开(公告)日：2013-11-14

    申请号：US13888920

    申请日：2013-05-07

    申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

    发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

    IPC分类号： B81B3/00 ,  B81C1/00

    CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

    摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

    摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

    Drive element and method for operating a drive element
    7.
    发明授权
    Drive element and method for operating a drive element 有权
    用于操作驱动元件的驱动元件和方法

    公开(公告)号：US08427031B2

    公开(公告)日：2013-04-23

    申请号：US12645120

    申请日：2009-12-22

    申请人： Axel Franke

    发明人： Axel Franke

    IPC分类号： H02N1/00

    CPC分类号： B81B3/0021 ,  B81B2203/0136 ,  B81B2203/04 ,  G02B5/284 ,  G02B26/001 ,  G02B26/0841 ,  G09G3/3433 ,  H02N1/008 ,  H03H9/02275

    摘要： A drive element is provided having a substrate, a seismic mass, a drive electrode and a counter-electrode, one of the two electrodes being connected to the substrate and the other of the two electrodes being connected to the seismic mass; and the drive electrode and the counter-electrodes being provided for the excitation of motion of the seismic mass in a main direction of motion; and in addition, the drive electrode includes a first and a second partial electrode, which are switchable separately from each other.

    摘要翻译： 提供具有基板，地震块，驱动电极和对电极的驱动元件，两个电极中的一个连接到基板，并且两个电极中的另一个连接到地震块; 并且所述驱动电极和所述对置电极被设置为用于激励所述地震块在主运动方向上的运动; 此外，驱动电极包括可彼此分开切换的第一和第二部分电极。

    Hot-film air mass meter having frequency-modulated signal detection
    9.
    发明授权
    Hot-film air mass meter having frequency-modulated signal detection 有权
    具有调频信号检测的热膜空气质量计

    公开(公告)号：US07861586B2

    公开(公告)日：2011-01-04

    申请号：US11990573

    申请日：2006-06-13

    申请人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

    发明人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6986 ,  G01F1/6845 ,  G01F1/692

    摘要： A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω.

    摘要翻译： 用于测量沿主流动方向流动的空气质量流量的方法和能够实现该方法的热膜空气质量计。 该方法和热膜空气质量计特别适用于内燃机的进气道。 热膜空气质量计包括具有能够流过空气质量流的芯片表面的传感器芯片。 芯片表面依次具有测量表面，测量表面包括具有至少一个中央加热元件和至少两个温度传感器的中心热膜空气质量计电路。 实施该方法使得使用频率ω周期性地加热至少一个中央加热元件。 借助于至少两个温度传感器，至少检测两个测量信号。 使用频率ω调制至少两个测量信号的测量信号和/或至少一个差分信号。

    Device for resonantly driving a micromechanical system
    10.
    发明授权
    Device for resonantly driving a micromechanical system 有权
    用于共振驱动微机械系统的装置

    公开(公告)号：US08826735B2

    公开(公告)日：2014-09-09

    申请号：US13259976

    申请日：2010-01-28

    申请人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

    发明人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5755

    摘要： A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

    摘要翻译： 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。