发明授权
- 专利标题： Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same
- 专利标题（中）： 压力式流量控制参考和耐腐蚀压力式流量控制器用于相同
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申请号： US13483159申请日： 2012-05-30
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公开(公告)号： US08381755B2公开(公告)日： 2013-02-26
- 发明人: Shuji Moriya , Wataru Okase , Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Yasutaka Hayashi , Toshihide Yoshida , Yasuyuki Omata
- 申请人： Shuji Moriya , Wataru Okase , Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Yasutaka Hayashi , Toshihide Yoshida , Yasuyuki Omata
- 申请人地址： JP Osaka JP Tokyo
- 专利权人： Fujikin Incorporated,Tokyo Electron Limited
- 当前专利权人： Fujikin Incorporated,Tokyo Electron Limited
- 当前专利权人地址： JP Osaka JP Tokyo
- 代理机构： Griffin & Szipl, P.C.
- 优先权： JP2007-319977 20071211
- 主分类号： G05D7/06
- IPC分类号： G05D7/06 ; G05D7/00 ; F16K31/12 ; F16K31/02 ; G01F25/00
摘要：
A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.
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