Invention Grant
- Patent Title: Methods for reduced stress anchors
- Patent Title (中): 减少应力锚的方法
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Application No.: US13237838Application Date: 2011-09-20
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Publication No.: US08383442B2Publication Date: 2013-02-26
- Inventor: Michael Foster , Mark Williams , Mark Eskridge
- Applicant: Michael Foster , Mark Williams , Mark Eskridge
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Lowe Graham Jones PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
Methods of anchoring components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured to flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.
Public/Granted literature
- US20120070931A1 METHODS FOR REDUCED STRESS ANCHORS Public/Granted day:2012-03-22
Information query
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