发明授权
- 专利标题: Three-dimensional semiconductor memory device and method of fabricating the same
- 专利标题(中): 三维半导体存储器件及其制造方法
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申请号: US12662187申请日: 2010-04-05
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公开(公告)号: US08383482B2公开(公告)日: 2013-02-26
- 发明人: Jinho Kim , Byoungkeun Son , Hansoo Kim , Wonjun Lee , Daehyun Jang
- 申请人: Jinho Kim , Byoungkeun Son , Hansoo Kim , Wonjun Lee , Daehyun Jang
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2009-0092452 20090929
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method of fabricating a semiconductor memory device includes alternately and repeatedly stacking sacrificial layers and insulating layers on a substrate, forming an active pattern penetrating the sacrificial layers and the insulating layers, continuously patterning the insulating layers and the sacrificial layers to form a trench, removing the sacrificial layers exposed in the trench to form recess regions exposing a sidewall of the active pattern, forming an information storage layer on the substrate, forming a gate conductive layer on the information storage layer, such that the gate conductive layer fills the recess regions and defines an empty region in the trench, the empty region being surrounded by the gate conductive layer, and performing an isotropic etch process with respect to the gate conductive layer to form gate electrodes in the recess regions, such that the gate electrodes are separated from each other.
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