Invention Grant
US08388854B2 Methods of forming nanodots using spacer patterning techniques and structures formed thereby
失效
使用间隔图案化技术和由此形成的结构形成纳米点的方法
- Patent Title: Methods of forming nanodots using spacer patterning techniques and structures formed thereby
- Patent Title (中): 使用间隔图案化技术和由此形成的结构形成纳米点的方法
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Application No.: US11968091Application Date: 2007-12-31
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Publication No.: US08388854B2Publication Date: 2013-03-05
- Inventor: Brian Doyle , Been-Yih Jin , Jack Kavalieros , Robert Chau
- Applicant: Brian Doyle , Been-Yih Jin , Jack Kavalieros , Robert Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Forefront IP Lawgroup, PLLC
- Main IPC: C23F1/00
- IPC: C23F1/00

Abstract:
Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a first block on a nanodot material, forming a first spacer on the first block, removing the first block to form a free standing spacer, removing exposed portions of the nanodot material and then the free standing spacer to form nanowires, forming a second block at an angle to a length of the nanowires, forming a second spacer on the second block, forming a second free standing spacer on the nanowires by removing the second block, and removing exposed portions of the nanowires and then the second free standing spacer to form an ordered array of nanodots.
Public/Granted literature
- US20100285279A1 METHODS OF FORMING NANODOTS USING SPACER PATTERNING TECHNIQUES AND STRUCTURES FORMED THEREBY Public/Granted day:2010-11-11
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