Invention Grant
- Patent Title: Methods of forming electronic devices
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Application No.: US12825166Application Date: 2010-06-28
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Publication No.: US08394571B2Publication Date: 2013-03-12
- Inventor: Young Cheol Bae , Thomas Cardolaccia , Yi Liu
- Applicant: Young Cheol Bae , Thomas Cardolaccia , Yi Liu
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Agent Jonathan D. Baskin
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/40
Abstract:
Methods of forming electronic devices are provided. The methods involve alkaline treatment of photoresist patterns and allow for the formation of high density resist patterns. The methods find particular applicability in semiconductor device manufacture.
Public/Granted literature
- US20110117490A1 METHODS OF FORMING ELECTRONIC DEVICES Public/Granted day:2011-05-19
Information query
