发明授权
US08394683B2 Methods of forming semiconductor constructions, and methods of forming NAND unit cells
有权
形成半导体结构的方法,以及形成NAND单元电池的方法
- 专利标题: Methods of forming semiconductor constructions, and methods of forming NAND unit cells
- 专利标题(中): 形成半导体结构的方法,以及形成NAND单元电池的方法
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申请号: US12014508申请日: 2008-01-15
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公开(公告)号: US08394683B2公开(公告)日: 2013-03-12
- 发明人: D. V. Nirmal Ramaswamy , Gurtej S. Sandhu
- 申请人: D. V. Nirmal Ramaswamy , Gurtej S. Sandhu
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L27/115
摘要:
Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.
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