发明授权
US08397360B2 Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
有权
用于制造具有体声波(BAW)谐振器的单片振荡器的方法
- 专利标题: Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
- 专利标题(中): 用于制造具有体声波(BAW)谐振器的单片振荡器的方法
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申请号: US12896394申请日: 2010-10-01
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公开(公告)号: US08397360B2公开(公告)日: 2013-03-19
- 发明人: Pierre Bar , Sylvain Joblot , Jean-Francois Carpentier
- 申请人: Pierre Bar , Sylvain Joblot , Jean-Francois Carpentier
- 申请人地址: FR Montrouge
- 专利权人: STMicroelectronics SA
- 当前专利权人: STMicroelectronics SA
- 当前专利权人地址: FR Montrouge
- 代理机构: Seed IP Law Group PLLC
- 优先权: FR0956849 20091001
- 主分类号: H01G7/00
- IPC分类号: H01G7/00
摘要:
A method of adjustment on manufacturing of a monolithic oscillator including circuit elements and a BAW resonator, this method including the steps of: a) forming the circuit elements and the resonator and electrically connecting them; b) covering the resonator with a frequency adjustment layer; c) measuring the output frequency of the oscillator; d) modifying the thickness of the frequency adjustment layer to modify the output frequency of the oscillator.
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