Invention Grant
US08397360B2 Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
有权
用于制造具有体声波(BAW)谐振器的单片振荡器的方法
- Patent Title: Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
- Patent Title (中): 用于制造具有体声波(BAW)谐振器的单片振荡器的方法
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Application No.: US12896394Application Date: 2010-10-01
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Publication No.: US08397360B2Publication Date: 2013-03-19
- Inventor: Pierre Bar , Sylvain Joblot , Jean-Francois Carpentier
- Applicant: Pierre Bar , Sylvain Joblot , Jean-Francois Carpentier
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics SA
- Current Assignee: STMicroelectronics SA
- Current Assignee Address: FR Montrouge
- Agency: Seed IP Law Group PLLC
- Priority: FR0956849 20091001
- Main IPC: H01G7/00
- IPC: H01G7/00

Abstract:
A method of adjustment on manufacturing of a monolithic oscillator including circuit elements and a BAW resonator, this method including the steps of: a) forming the circuit elements and the resonator and electrically connecting them; b) covering the resonator with a frequency adjustment layer; c) measuring the output frequency of the oscillator; d) modifying the thickness of the frequency adjustment layer to modify the output frequency of the oscillator.
Public/Granted literature
- US20110078894A1 METHOD FOR MANUFACTURING MONOLITHIC OSCILLATOR WITH BAW RESONATORS Public/Granted day:2011-04-07
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