发明授权
US08397360B2 Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators 有权
用于制造具有体声波(BAW)谐振器的单片振荡器的方法

Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
摘要:
A method of adjustment on manufacturing of a monolithic oscillator including circuit elements and a BAW resonator, this method including the steps of: a) forming the circuit elements and the resonator and electrically connecting them; b) covering the resonator with a frequency adjustment layer; c) measuring the output frequency of the oscillator; d) modifying the thickness of the frequency adjustment layer to modify the output frequency of the oscillator.
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