发明授权
- 专利标题： Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters
- 专利标题（中）： 工件等离子体涂层的工艺和设备，具有工艺参数的光谱评估
-
申请号： US11215163申请日： 2005-08-30
-
公开(公告)号： US08397667B2公开(公告)日： 2013-03-19
- 发明人: Stephan Behle , Andreas Lüettringhaus-Henkel , Peter Eimann , Juergen Klein
- 申请人： Stephan Behle , Andreas Lüettringhaus-Henkel , Peter Eimann , Juergen Klein
- 申请人地址： DE Mainz
- 专利权人： Schott AG
- 当前专利权人： Schott AG
- 当前专利权人地址： DE Mainz
- 代理机构： Ohlandt, Greeley, Ruggiero & Perle, LLP
- 优先权： DE102004042431 20040831
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; C23F1/00 ; H01L21/306
摘要：
The invention provides a process for coating workpieces by plasma-induced chemical vapor deposition, in which a process gas is introduced into a coating chamber and a plasma is ignited by electromagnetic energy in at least one region of the coating chamber which adjoins the workpiece and in which the process gas is present, wherein the coating operation is monitored on the basis of at least one measured spectral parameter of the plasma, and the workpiece is removed in the event of a deviation from a desired range for the parameter.
公开/授权文献
信息查询
IPC分类:
