Invention Grant
US08399280B2 Method for protecting an integrated circuit chip against laser attacks
有权
保护集成电路芯片免受激光攻击的方法
- Patent Title: Method for protecting an integrated circuit chip against laser attacks
- Patent Title (中): 保护集成电路芯片免受激光攻击的方法
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Application No.: US12897217Application Date: 2010-10-04
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Publication No.: US08399280B2Publication Date: 2013-03-19
- Inventor: Pascal Fornara , Fabrice Marinet
- Applicant: Pascal Fornara , Fabrice Marinet
- Applicant Address: FR Rousset
- Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee Address: FR Rousset
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR0956920 20091005
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for protecting, against laser attacks, an integrated circuit chip formed inside and on top of a semiconductor substrate and including in the upper portion of the substrate an active portion in which are formed components, this method including the steps of: forming in the substrate a gettering area extending under the active portion, the upper limit of the area being at a depth ranging between 5 and 50 μm from the upper surface of the substrate; and introducing diffusing metal impurities into the substrate.
Public/Granted literature
- US20110080190A1 METHOD FOR PROTECTING AN INTEGRATED CIRCUIT CHIP AGAINST LASER ATTACKS Public/Granted day:2011-04-07
Information query
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