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US08400237B2 Circuit device including a nano-composite dielectric film 失效
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Circuit device including a nano-composite dielectric film
摘要:
A circuit device includes a substrate 11, and a transmission line 10. The transmission line 10 includes a dielectric film 13 formed on the substrate 11, and a signal line formed on the dielectric film 13. The dielectric film 13 includes a nano-composite film in which particles of a first material are dispersed in a second material.
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