Invention Grant
- Patent Title: Imprint apparatus and method of manufacturing article
- Patent Title (中): 印刷装置及其制造方法
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Application No.: US12566572Application Date: 2009-09-24
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Publication No.: US08404169B2Publication Date: 2013-03-26
- Inventor: Eigo Kawakami , Hideki Ina , Junichi Seki , Atsunori Terasaki , Shingo Okushima , Motoki Okinaka
- Applicant: Eigo Kawakami , Hideki Ina , Junichi Seki , Atsunori Terasaki , Shingo Okushima , Motoki Okinaka
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc., IP Division
- Priority: JP2008-246333 20080925
- Main IPC: B29B11/08
- IPC: B29B11/08 ; B29C45/76

Abstract:
An imprint apparatus for pressing resin and a mold to each other in a Z-axis direction to form a resin pattern on a shot region includes: a mold chuck; an X-Y stage; a reference mark formed on the stage; a first scope configured to measure a positional deviation in an x-y plane between a mold mark and the reference mark; a second scope configured to measure a position of a substrate mark in the plane not via the mold mark; and a dispenser configured to dispense resin. In the plane, the dispenser center is deviated in position from the mold chuck center by a first distance in a first direction, and the second scope center is deviated in position from the dispenser center by a distance smaller than twice the first distance in the first direction or a second direction opposite thereto.
Public/Granted literature
- US20100072664A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2010-03-25
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