发明授权
- 专利标题: Objective-optical-system positioning apparatus and examination apparatus
- 专利标题(中): 物镜光学定位装置及检查装置
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申请号: US12790112申请日: 2010-05-28
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公开(公告)号: US08405903B2公开(公告)日: 2013-03-26
- 发明人: Tadashi Hirata , Masahiro Oba
- 申请人: Tadashi Hirata , Masahiro Oba
- 申请人地址: JP Tokyo
- 专利权人: Olympus Corporation
- 当前专利权人: Olympus Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Holtz, Holtz, Goodman & Chick, P.C.
- 优先权: JP2009-133449 20090602
- 主分类号: G02B21/00
- IPC分类号: G02B21/00 ; G02B21/02
摘要:
An objective-optical-system positioning apparatus includes a positioning unit interposed between an objective optical system having a small-diameter end section and an examination optical system for examining light collected by the objective optical system; and a substantially cylindrical support unit, one end of which is secured to an organism, and which internally supports the small-diameter end section in a detachable manner. The positioning unit includes a holding part for holding the objective optical system and a moving mechanism supporting the holding part such that the holding part is freely movable in a direction intersecting with a direction of an optical axis of the objective optical system, and the other end of the support unit has a tapered inner surface whose diameter gradually increases toward the tip.
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