发明授权
- 专利标题: Method for manufacturing thin film magnetic heads
- 专利标题(中): 薄膜磁头制造方法
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申请号: US12559327申请日: 2009-09-14
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公开(公告)号: US08407882B2公开(公告)日: 2013-04-02
- 发明人: Takateru Seki , Zhou Wenjun , Kazuo Takeda , Takefumi Kubota
- 申请人: Takateru Seki , Zhou Wenjun , Kazuo Takeda , Takefumi Kubota
- 申请人地址: NL Amsterdam
- 专利权人: HGST Netherlands B.V.
- 当前专利权人: HGST Netherlands B.V.
- 当前专利权人地址: NL Amsterdam
- 代理机构: Zilka-Kotab, PC
- 优先权: JP2008-247988 20080926
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
公开/授权文献
- US20100077600A1 Method for Manufacturing Thin Film Magnetic Heads 公开/授权日:2010-04-01
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