发明授权
US08409902B1 Ablation of film stacks in solar cell fabrication processes 有权
在太阳能电池制造工艺中消除薄膜叠层

Ablation of film stacks in solar cell fabrication processes
摘要:
A dielectric film stack of a solar cell is ablated using a laser. The dielectric film stack includes a layer that is absorptive in a wavelength of operation of the laser source. The laser source, which fires laser pulses at a pulse repetition rate, is configured to ablate the film stack to expose an underlying layer of material. The laser source may be configured to fire a burst of two laser pulses or a single temporally asymmetric laser pulse within a single pulse repetition to achieve complete ablation in a single step.
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