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    Ablation of film stacks in solar cell fabrication processes
    1.
    发明授权
    Ablation of film stacks in solar cell fabrication processes 有权
    在太阳能电池制造工艺中消除薄膜叠层

    公开(公告)号：US08211731B2

    公开(公告)日：2012-07-03

    申请号：US12795526

    申请日：2010-06-07

    申请人： Gabriel Harley ,  Taeseok Kim ,  Peter John Cousins

    发明人： Gabriel Harley ,  Taeseok Kim ,  Peter John Cousins

    IPC分类号： H01L21/00

    CPC分类号： H01L31/18 ,  B23K26/0622 ,  B23K26/384 ,  B23K26/40 ,  B23K26/402 ,  B23K2103/172 ,  B23K2103/50 ,  H01L31/02167 ,  H01L31/0682 ,  Y02E10/547 ,  Y10S438/94

    摘要： A dielectric film stack of a solar cell is ablated using a laser. The dielectric film stack includes a layer that is absorptive in a wavelength of operation of the laser source. The laser source, which fires laser pulses at a pulse repetition rate, is configured to ablate the film stack to expose an underlying layer of material. The laser source may be configured to fire a burst of two laser pulses or a single temporally asymmetric laser pulse within a single pulse repetition to achieve complete ablation in a single step.

    摘要翻译： 使用激光烧蚀太阳能电池的电介质膜堆叠。 电介质膜堆叠包括在激光源的工作波长中吸收的层。 以脉冲重复频率激发激光脉冲的激光源被配置为烧蚀膜堆以暴露下层材料。 激光源可以被配置为在单个脉冲重复中触发两个激光脉冲或单个时间不对称激光脉冲的脉冲，以在单个步骤中实现完全消融。

    Ablation of film stacks in solar cell fabrication processes
    3.
    发明授权
    Ablation of film stacks in solar cell fabrication processes 有权
    在太阳能电池制造工艺中消除薄膜叠层

    公开(公告)号：US08409902B1

    公开(公告)日：2013-04-02

    申请号：US13486095

    申请日：2012-06-01

    申请人： Gabriel Harley ,  Taeseok Kim ,  Peter John Cousins

    发明人： Gabriel Harley ,  Taeseok Kim ,  Peter John Cousins

    IPC分类号： H01L21/00

    CPC分类号： H01L31/18 ,  B23K26/0622 ,  B23K26/384 ,  B23K26/40 ,  B23K26/402 ,  B23K2103/172 ,  B23K2103/50 ,  H01L31/02167 ,  H01L31/0682 ,  Y02E10/547 ,  Y10S438/94

    摘要： A dielectric film stack of a solar cell is ablated using a laser. The dielectric film stack includes a layer that is absorptive in a wavelength of operation of the laser source. The laser source, which fires laser pulses at a pulse repetition rate, is configured to ablate the film stack to expose an underlying layer of material. The laser source may be configured to fire a burst of two laser pulses or a single temporally asymmetric laser pulse within a single pulse repetition to achieve complete ablation in a single step.

    摘要翻译： 使用激光烧蚀太阳能电池的电介质膜堆叠。 电介质膜堆叠包括在激光源的工作波长中吸收的层。 以脉冲重复频率激发激光脉冲的激光源被配置为烧蚀膜堆以暴露下层材料。 激光源可以被配置为在单个脉冲重复中触发两个激光脉冲或单个时间不对称激光脉冲的脉冲，以在单个步骤中实现完全消融。

    High throughput laser ablation processes and structures for forming contact holes in solar cells
    4.
    发明授权
    High throughput laser ablation processes and structures for forming contact holes in solar cells 有权
    用于在太阳能电池中形成接触孔的高通量激光烧蚀工艺和结构

    公开(公告)号：US08692111B2

    公开(公告)日：2014-04-08

    申请号：US13298136

    申请日：2011-11-16

    申请人： Taeseok Kim ,  Gabriel Harley ,  David D. Smith ,  Peter John Cousins

    发明人： Taeseok Kim ,  Gabriel Harley ,  David D. Smith ,  Peter John Cousins

    IPC分类号： H01L21/00 ,  H01L31/00

    CPC分类号： H01L31/1804 ,  H01L31/022441 ,  H01L31/0682 ,  Y02E10/547 ,  Y02P70/521

    摘要： Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Throughput of the solar cell ablation process is improved by incorporating linear base diffusion regions with narrow width, for example as compared to an overlying metal contact. Throughput of the solar cell ablation process may also be improved by having contact holes to base diffusion regions that are perpendicular to contact holes to emitter diffusion regions. To allow for continuous laser scanning, a laser blocking layer may be located over an interlayer dielectric to prevent contact hole formation on certain regions, such as regions where a metal contact of one polarity may electrically shunt to a diffusion region of opposite polarity. In a hybrid design, a solar cell may have both linear and dotted base diffusion regions. An electro-optical modulator may be employed to allow for continuous laser scanning in dotted base diffusion designs.

    摘要翻译： 通过激光烧蚀形成太阳能电池的接触孔，以适应各种太阳能电池设计。 通过结合具有窄宽度的线性基极扩散区域，例如与覆盖的金属接触相比，改善了太阳能电池烧蚀过程的吞吐量。 通过将与接触孔垂直的基底扩散区域的接触孔设置到发射极扩散区，也可以改善太阳能电池烧蚀过程的吞吐量。 为了允许连续激光扫描，激光阻挡层可以位于层间电介质上方，以防止在某些区域（例如一个极性的金属接触可以电分流到相反极性的扩散区域的区域）上的接触孔形成。 在混合设计中，太阳能电池可以具有线性和点状的基极扩散区域。 可以使用电光调制器来允许在虚点扩散设计中的连续激光扫描。