发明授权
- 专利标题: Methods of patterning platinum-containing material
- 专利标题(中): 图案化含铂材料的方法
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申请号: US13083354申请日: 2011-04-08
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公开(公告)号: US08409960B2公开(公告)日: 2013-04-02
- 发明人: Andrey V. Zagrebelny , Chet E. Carter
- 申请人: Andrey V. Zagrebelny , Chet E. Carter
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Some embodiments include methods of patterning platinum-containing material. An opening may be formed to extend into an oxide. Platinum-containing material may be formed over and directly against an upper surface of the oxide, and within the opening. The platinum-containing material within the opening may be a plug having a lateral periphery. The lateral periphery of the plug may be directly against the oxide. The platinum-containing material may be subjected to polishing to remove the platinum-containing material from over the upper surface of the oxide. The polishing may delaminate the platinum-containing material from the oxide, and may remove the platinum-containing material from over the oxide with an effective selectivity for the platinum-containing material relative to the oxide of at least about 5:1. Some embodiments include methods of forming memory cells. Some embodiments include integrated circuitry having platinum-containing material within an opening in an oxide and directly against the oxide.
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