发明授权
- 专利标题: Surface shape measurement apparatus
- 专利标题(中): 表面形状测量装置
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申请号: US12891736申请日: 2010-09-27
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公开(公告)号: US08411280B2公开(公告)日: 2013-04-02
- 发明人: Ryuichi Sato
- 申请人: Ryuichi Sato
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2009-229993 20091001; JP2010-083402 20100331
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01B11/30
摘要:
An apparatus for measuring a shape of a surface, comprises a measurement head which measures at least one of a distance between a reference point and the surface and a direction of a normal from the surface to the reference point, a scanning mechanism which scans the measurement head, and a processor which calculates the shape of the surface based on a measurement result measured using the measurement head and coordinates of the reference point, wherein the coordinates of the reference point are calibrated using a measurement result measured by scanning the measurement head along a scanning path in association with a first surface to be measured, and a shape of a second surface to be measured is calculated based on a measurement result measured by scanning the measurement head along the same scanning path in association with the second surface, and the calibrated coordinates of the reference point.
公开/授权文献
- US20110080593A1 SURFACE SHAPE MEASUREMENT APPARATUS 公开/授权日:2011-04-07
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