发明授权
- 专利标题: Field effect transistor and method for manufacturing the same
- 专利标题(中): 场效应晶体管及其制造方法
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申请号: US13284889申请日: 2011-10-29
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公开(公告)号: US08415210B2公开(公告)日: 2013-04-09
- 发明人: Chang-Woo Oh , Dong-Gun Park , Dong-Won Kim , Dong-Uk Choi , Kyoung-Hwan Yeo
- 申请人: Chang-Woo Oh , Dong-Gun Park , Dong-Won Kim , Dong-Uk Choi , Kyoung-Hwan Yeo
- 申请人地址: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- 代理机构: Muir Patent Consulting, PLLC
- 优先权: KR2004-44512 20040616
- 主分类号: H01L21/337
- IPC分类号: H01L21/337 ; H01L21/8234
摘要:
A field effect transistor (FET) and a method for manufacturing the same, in which the FET may include an isolation film formed on a semiconductor substrate to define an active region, and a gate electrode formed on a given portion of the semiconductor substrate. A channel layer may be formed on a portion of the gate electrode, with source and drain regions formed on either side of the channel layer so that boundaries between the channel layer and the source and drain regions of the FET may be perpendicular to a surface of the semiconductor substrate.
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