Invention Grant
- Patent Title: Method and apparatus of growing a thin film
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Application No.: US11987307Application Date: 2007-11-29
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Publication No.: US08420186B2Publication Date: 2013-04-16
- Inventor: Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
- Applicant: Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
- Applicant Address: TW
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW
- Agency: Bacon & Thomas, PLLC
- Priority: TW95148509A 20061222
- Main IPC: B06B1/20
- IPC: B06B1/20
Abstract:
A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.
Public/Granted literature
- US20080152836A1 Method and apparatus of growing a thin film Public/Granted day:2008-06-26
Information query
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