- 专利标题： Method and apparatus of growing a thin film
-
申请号： US11987307申请日： 2007-11-29
-
公开(公告)号： US08420186B2公开(公告)日： 2013-04-16
- 发明人: Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
- 申请人： Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
- 申请人地址： TW
- 专利权人： Industrial Technology Research Institute
- 当前专利权人： Industrial Technology Research Institute
- 当前专利权人地址： TW
- 代理机构： Bacon & Thomas, PLLC
- 优先权： TW95148509A 20061222
- 主分类号： B06B1/20
- IPC分类号： B06B1/20
摘要：
A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.
公开/授权文献
- US20080152836A1 Method and apparatus of growing a thin film 公开/授权日：2008-06-26
信息查询
IPC分类:
