发明授权
- 专利标题: Semiconductor memory and manufacturing method thereof
- 专利标题(中): 半导体存储器及其制造方法
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申请号: US13187782申请日: 2011-07-21
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公开(公告)号: US08420408B2公开(公告)日: 2013-04-16
- 发明人: Min Suk Lee , Byung Gu Gyun , Bo Kyoung Jung , Chang Hyup Shin
- 申请人: Min Suk Lee , Byung Gu Gyun , Bo Kyoung Jung , Chang Hyup Shin
- 申请人地址: KR Gyeonggi-do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: IP & T Group LLP
- 优先权: KR10-2010-0070527 20100721
- 主分类号: H01L43/08
- IPC分类号: H01L43/08
摘要:
A method for manufacturing a semiconductor memory device includes sequentially depositing a bottom electrode layer, a magnetic tunnel junction (MTJ) layer, a first top electrode layer, a second top electrode layer and a mask layer, etching the mask layer and forming a mask pattern, etching the second top electrode layer and the first top electrode layer by using the mask pattern as an etch barrier, etching the MTJ layer by using the mask layer and the second top electrode layer as an etch barrier, and etching the bottom electrode layer by using the first top electrode layer as an etch barrier.
公开/授权文献
- US20120018826A1 SEMICONDUCTOR MEMORY AND MANUFACTURING METHOD THEREOF 公开/授权日:2012-01-26
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