发明授权
- 专利标题: Charged-particle energy analyzer
- 专利标题(中): 带电粒子能量分析仪
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申请号: US13119689申请日: 2010-07-16
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公开(公告)号: US08421030B2公开(公告)日: 2013-04-16
- 发明人: Khashayar Shadman , Robert Haynes , Gabor D. Toth , Christopher Sears , Mehran Nasser Ghodsi
- 申请人: Khashayar Shadman , Robert Haynes , Gabor D. Toth , Christopher Sears , Mehran Nasser Ghodsi
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Okamoto & Benedicto LLP
- 国际申请: PCT/US2010/042313 WO 20100716
- 国际公布: WO2011/009065 WO 20110120
- 主分类号: G01K1/08
- IPC分类号: G01K1/08
摘要:
One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh.
公开/授权文献
- US20110168886A1 CHARGED-PARTICLE ENERGY ANALYZER 公开/授权日:2011-07-14
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